The Instructional Cleanroom can support CMOS-compatible microfabrication and be used to fabricate microelectronic devices, MEMS devices and simple integrated circuits on a silicon wafer. Details of exemplary processing information are described in each section. MOSFET transistors or other devices can be fabricated in the Instructional Cleanroom with the combination of the processes. A sequence of CMOS fabrication currently provided in the cleanroom is described in the CMOS Fabrication section.