The Instructional Cleanroom (IC) is a dedicated cleanroom to provide instructional lab sections to undergraduate and graduate students at Georgia Tech. Due to the nature of the IC’s purpose, only CMOS-qualified processes can be processed with approved process flows. The IC is capable to fabricate CMOS devices on silicon wafers with conventional microfabrication processes such as RCA cleaning, Oxidation, Diffusion, Photolithography, Etching and Metallization. Also, MEMS devices with CMOS-compatible processes can be fabricated.