Graduate and Undergraduate Courses with Laboratory Sections

The Instructional Centerof IEN supports courses for Georgia Tech students by combining standard lectures with hands-on fabrication experience. Both graduate and undergraduate students gain valuable real-world, relevant experience with advanced fabrication tools in laboratory and cleanroom environments

The IEN provides support to Georgia Tech colleges and schools for disciplinary and inter-disciplinary courses in microelectronics devices and microelectronics packaging. These hands-on courses, which are conducted in world-class prototype cleanroom laboratories, offer students the opportunity to experience complete process cycles from design to fabrication.

Current Courses in the Instructional Cetner

• ECE4452; Integrated Circuit Fabrication (Link)

  A course in which students get the opportunity to learn about and experience the manufacturing technologies associated with integrated circuit fabrication. Ultimately the students fabricate basic integrated circuit elements (NMOS, PMOS, capacitors, resistors) as well as more complex CMOS circuits such as ring oscillators, inverters, NAND gates, and NOR gates. The course culminates in the characterization of the fabricated devices and circuits as well as a process design project aimed at improving the existing manufacturing process.

  Lecture Instructors: Professor A. Bruno Frazier, Professor Ajeet Rohatgi, Professor Muhannad S. Bakir

  Lab Instructor: Dr. Seung-Joon Paik




• ChBE 4050/6050; The Science and Engineering of Microelectronic Fabrication (Link)

  A course for senior level undergraduates in ChBE (or Chemistry) and graduate students in the chemical sciences interested in semiconductor materials and fabrication. The course presents the fundamentals and applications of materials and processes used in the fabrication of semiconductor devices, including integrated circuits. The chemical and engineering issues associated with the processing of the materials used in the fabrication of microelectronic devices are covered. The course will have five hands-on laboratory experiments which form the basic unit operations used in semiconductor microfabrication. The course will provide the fundamentals of materials synthesis, chemical and mechanical properties, and chemical reactions. In addition, the sequence of processes used to fabricate metal-oxide semiconductor (MOS) integrated circuits will be presented. The set of exploratory experiments includes silicon dioxide deposition, photolithography, diffusion and semiconductor doping, metallization and silicide formation, and integrated circuit testing.

  Lecture Instructor: Professor Paul Kohl

  Lab Instructor: Dr. Mikkel Thomas




• ME/ECE/ChBE 6229; Introduction to MEMS (Link)

  The course is designed to span all of engineering to explore the theory and practice of MEMS (Micro ElectroMechanical Systems) fabrication, which integrates hands-on learning with the classroom. Graduate students learn the fundamentals of engineering on the microscale while concurrently utilizing the Institute for Electronics and Nanotechnology Cleanroom throughout a 9-laboratory set to create microresonator sensors. These sensors are simpler versions of the accelerometers that exist in students’ smart phones. Students have stated that the intellectual foundation of the classroom and the hands-on skills learned in the cleanroom were the best aspects of the course.

  Lecture Instructors: Professor Peter J. Hesketh, Professor Todd Sulchek, Professor W. Hong Yeo

  Lab Instructor: Dr. Seung-Joon Paik