IMS Instructional Center
1-1) Characterization

List of machines for the characterization of wafers and thin films

Tools Description
Alpha-SE Ellipsometer

For routine measurements of thin film thickness and refractive index, the Alpha-SE® is a great solution. Designed for ease-of-use: simply place the sample on the stage, choose the model that matches your film, and press measure.

Filmetrics

A general-purpose film thickness measurement instrument. Thickness and refractive index can be measured in less than a second. A tabletop system for measuring film thickness and refractive index with a single mouse-click. It measures film thicknesses of 15nm - 70µm in the wavelength range of 380 – 1050nm and 1nm - 40µm in 190 – 1100nm.

Hot probe

An experimental setup for distinguishing between n-type and p-type semiconductors by contacting the wafer with a “HOT” probe such as a heated soldering iron and a “COLD” probe. Both probes are wired to a galvanometer.

Microscope 1

A Nikon Optiphot66 based microscope. The general-purpose bright field microscope is equipped with a Zeiss Axiocam 105 camera which provides high resolution 5-megapixel CMOS sensor and 8-bit digitization.

Microscope 2

A general-purpose bright field microscope equipped with a Nikon camera.

Pro4 Four Point Probe

A four-point probe provides sheet and bulk resistivity measurements. To make the measurements, the user selects “TEST” button in the software then lowers the four-point probe head onto the sample. The computer automatically controls the Keithley 2400 SourceMeter and steps through several current settings to find the ideal current for accurate readings. A V/I measurement is taken and recorded. The system includes Keithley 2400, four-point probe head, Pro4 software and Pro4 stand.

Semprex Spectrometer

Equipped with Ocean Optics USB2000 Spectrometer and Semprex stage. The USB2000 spectrometer is a versatile, general-purpose UV-Vis-NIR spectrometer for absorption, transmission, reflectance, emission, color, and other applications. The USB2000 spectrometers is connected to optical fiber with light sources to measure film properties of samples.

Thickness Gauge

Mitutoyo's Granite Comparator Stands are basic building-blocks for the assembly of special-purpose, precision measuring equipment. The stand is mounted with a precision Linear Gage. The rigid granite base is free from burrs, pileups, rust, and deterioration over time.

Veeco Four Point Probe

The Veeco Four Point Probe measures the resistive properties of semiconductor wafers and resistive films: V/I, Sheet or slice resistivity, metallization thickness and P-N type testing.