Using Equipment Undergoing Maintenance or Marked Down -

Safety

1. Recipe Library

2. Fabrication Fundamentals

3. Equipment Selection

3. IEN Process Search

3. Standard Operation Procedure

Cambridge NanoTech ALD (left)

Cambridge NanoTech Plasma ALD - Right (non-metal)

Characterization based on Industry Standards

Chemical Dry Etch

Chemical Vapor Deposition (CVD)

Chemicals Inventory

Denton Infinity

Developers Provided

Electroless Plating

Flipchip Bonding

Chemicals, Gasses & Precursors

Cleanup Procedures

Glove Selection Chart

Policy Violations

Allowing an Unauthorized User to Run Equipment

Failure to Log In

Failure To Log Out

Granting Access to an Unauthorized User

Leaving Chemicals Without Proper Documentation

Logged Into Equipment More than the Allotted Time

Not Relabeling Properly Each Quarter

Not Showing Up For Cleanup

Not Wearing Proper Safety Equipment at the Fume Hood

Reserving Equipment in the Scheduler But Not Using the Equipment

Unauthorized use of any cleanroom equipment

Using Equipment Reserved for Another User

Using Equipment Undergoing Maintenance or Marked Down

Using Equipment With Someone Else's Buzzcard

Georgia Valve and Fitting

Incident Report

Instructional Lab Tools

K&S 4522 - Au Ball Bonding

K&S 4523A - Al Wedge Bonding

Karl Suss RC8 Spinner - Marcus

Karl Suss RC8 Spinner - Pettit

Laser MicroMachining Technologies

Metal Deposition

New Laser Proposal

Other Developers

Oxford ICP PECVD - Oxide

Oxford PECVD Left - Amorphous Silicon

Oxford PECVD Left - Carbide

Oxford PECVD Right - Oxide

Oxford PECVD Right - Standard Nitride Recipe

Plasma Therm PECVD - Standard Nitride Recipe

Plasma Therm PECVD - Standard Oxide Recipe

Plasma Therm SLR RIE

Polisher / Lapper

Polisher/Lapper

Polymer Curing/Sintering

Processing Help

PVD75 Filament Evaporator

Radiation Safety

Rapid Thermal Process

Remote Processing

Research Capabilities

SCS Spincoater Processing Tab

Silicon Dioxide Etching

Silicon Nitride Etching

STS PECVD 2 - Oxide

Suess AltaSpray Coater

Thermo Oxidation

Thin Film Materials

Titanium Etching

Tystar Poly Furnace 3

Wet Bench Chemicals

Using Equipment Undergoing Maintenance or Marked Down

Using equipment when it is undergoing maintenance and is marked not to be used or "Machine Down".

Penalty: Suspension from the cleanroom for up to three weeks. Repeat Offenders will incur more severe penalties.

Under no circumstances is a user allowed to perform any maintenance on any equipment. Any abnormalities while using the equipment must promptly be reported to the IEN Staff.

When a machine is undergoing maintenance/repairs, users must be cooperative and patient. No user is allowed to use equipment in a non-workable state, or when it is undergoing routine maintenance.