IEN - Micro/Nano Fabrication Facility
Processing (Older)
Unaxis PECVD

Related Links
training video
Contact Information
Hang Chen, Ph.D.
Process Support Manager
The Institute for Electronics and Nanotechnology at Georgia Tech
345 Ferst Drive, Atlanta GA, 30332 | 1152
404.894.3360 | hang.chen@ien.gatech.edu