Thin Film Materials -

Thin Film Materials

Metals

Au - Gold

	Gold


	Chemical Properties
	Boiling Point: 2970C Melting Point: 1948C

Ag - Silver

	Silver

	Chemical Properties
	Boiling Point:3924C Melting Point: 1763C

Cu - Copper

	Copper

	Chemical Properties
	Boiling Point: 4644C Melting Point: 1984C

Ni - Nickel

	Nickel

	Chemical Properties
	Boiling Point: 5275C Melting Point: 2650C

Pt - Platinum

	Platinum

	Chemical Properties
	Boiling Point: 6917C Melting Point: 3215C

Ti - Titanium

	Titanium

	Chemical Properties
	Boiling Point: 5948C Melting Point: 3034C

Fe - Ion

	Iron

	Chemical Properties
	Boiling Point: 5184C Melting Point: 2800C

Al - Aluminum

	Aluminum

	Chemical Properties
	Boiling Point: 4566C Melting Point: 1221C

Cr - Chromium

	Chromium

	Chemical Properties
	Boiling Point: 4841C Melting Point: 3465C

Mo - Molly

	Molybdenum

	Chemical Properties
	Boiling Point: 8382C Melting Point: 4753C

W - Tungsten

	Tungsten

	Chemical Properties
	Boiling Point: 10,030C Melting Point: 6,191C

Semiconductors

Oxides

Al2O3 - Aluminum Oxide

	Aluminum Oxide


	Chemical Properties
	Boiling Point: 5390C Melting Point: 3760C

SiO2 - Silicon Oxide

	Silicon Dioxide


	Chemical Properties
	Boiling Point: 4046C Melting Point: 2912C

TiO2 - Titanium Oxide

	Titanium Dioxide


	Chemical Properties
	Boiling Point: 5382C Melting Point: 3349C

HfO2 - Hafnium Oxide

ZrO2 - Zirconium Oxide

ZnO - Zinc Oxide

	Zinc Oxide

	Chemical Properties
	Boiling Point: 4280C Melting Point: 3587C

MgO - Magnesium Oxide

	Magnesium Oxide

	Chemical Properties
	Boiling Point: 4046C Melting Point: 2912C

IGZO - Indium-Garllium-Zinc Oxide

ITO - Indium Tin Oxide

	Indium Tin Oxide

	Chemical Properties
	Melting Point: 2200C

TEOS - Tetraethyl Orthosilicate

Nitrides

TiN - Titanium Nitride

SiN - Silicon Nitride

	Silicon Nitride

	Chemical Properties
	Melting Point: 2912C

HfN - Hafnium Nitride

AlN - Aluminum Nitride

	Silicon Nitride

	Chemical Properties
	Melting Point: 2912C