IEN - Micro/Nano Fabrication Facility
Processing (Older)
Solvents

Solvents Provided

Acetone

 Acetone
          Colorless, volatile, flammable liquid that is used as a solvent for stripping photoresists and cleaning residue from wafers.


 Chemical Properties
 
  • Boiling Point: 56C
  • Melting Point: -94C
  • Water soluble
 



Methanol

 Methanol
          Colorless, volatile, flammable liquid that is used as a solvent for dissolving a wide range of non-polar compounds.


 Chemical Properties
 
  • Boiling Point: 64.7C
  • Melting Point: -98C
  • Highly toxic
 



Isopropanol

 Isopropanol
          Colorless, volatile, flammable liquid that dissolves a wide range of non-polar compounds.


 Chemical Properties
 
  • Evaporates quickly
  • Leaves zero oil traces
  • Relatively non-toxic
  • Boiling Point: 180C
  • Melting Point: -128C



Trichloroethylene

 Trichloroethylene
          Colorless, non-flammable liquid that is an effective solvent for a variety of organic materials.


 Chemical Properties
 
  • Reacts with strong oxidizinng and reducing agents
  • Boiling Point: 87.2C
  • Melting Point: -73C
  • Toxic



Other Solvents

Dichlorobenzene

 Dichlorobenzene
          Solvent that softens and removes carbon-based contamination on metal surfaces


 Chemical Properties
 
  • Colorless
  • Poorly soluble in water
  • Miscible with most organic solvents
  • Boiling Point: 180C



Methanoxyethanol

 Methoxyethanol
          Solvent that dissolves a variety of different types of chemical compounds


 Chemical Properties
 
  • Colorless, clear
  • Miscible in water and other solvents
  • Incompatible with strong oxidizers
  • Boiling Point: 124-125C

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MEK

 MEK
          Solvent that is used as a cleaning agent that dissolve many different substances


 Chemical Properties
 
  • Also known as butanone or methyl ethyl ketone
  • Colorless
  • Soluble in water
  • Boiling Point: 79C



MIBK

 MIBK
          Solvent that is used to dissolve polymers


 Chemical Properties
 
  • Methyl isobutyl ketone
  • Colorless
  • Low solubility in water