Tystar Mini 3 - TEOS Oxide
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| Equipment | | | Equipment | Tystar Mini 3 |
| Manufacturer: | Tystar Inc. |
| Model | Mini |
| Tube Size | up to 6 in |
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| Recipe |
| Recipe Name: | TEOS Oxide |
| Gas | TEOS |
| TEOS Temperature | 35 - 50 ◦C |
| Gas Flow Rate | 100 - 150 sccm |
| Pressure | 225 – 350 mTorr |
| Temperature | 625 – 725 ◦C Gradient |
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| Resultsa |
| Deposition Rate | 20 - 25 nm/min |
| Index of Refraction | 1.41 – 1.46 |
| Uniformity: | < 5%b |
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| a: Date provided by Tystar Inc. b: Calculated using 1σ std. Deviation |
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