Tystar Nitride Furnace 4 - Nitride
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| Equipment | | | Equipment | Tystar Nitride Furnace 4 |
| Manufacturer: | Tystar Inc. |
| Model | Nitride |
| Tube Size | up to 6 in |
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| Recipe |
| Recipe Name: | Silicon Nitride |
| Gas | SiH2Cl2, NH3 |
| Gas Ratio | 3:1 |
| Gas Flow Rate | NH3: 120 - 150 sccm |
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| SiH2Cl2: 40 - 50 sccm |
| Pressure | 250 – 350 mTorr |
| Temperature | 800 – 830 ◦C Gradient |
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| Resultsa |
| Index of Refraction | 1.98 – 2.10 |
| Uniformity: | < 3% (using 1σ std. Deviation) |
| Residual Stress | 1000 – 1250 Mpa |
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| a: Data Provided by Tystar Inc. |
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