Tystar Nitride 4 - Low Stress Nitride
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| Equipment | | | Equipment | Tystar Nitride Furnace 4 |
| Manufacturer: | Tystar Inc. |
| Model | Nitride |
| Tube Size | up to 6 in |
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| Recipe |
| Recipe Name: | Low Stress Nitride |
| Gas | SiH2Cl2, NH3 |
| Gas Ratio | 4:1 ~ 6:1 |
| Pressure | 250 – 350 mTorr |
| Temperature | 800 – 840 ◦C Gradient |
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| Resultsa |
| Index of Refraction | 2.00 – 2.30 |
| Uniformity: | < 5% (using 1σ std. Deviation) |
| Residual Stress | 50 – 300 Mpab |
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| a: Date provided by Tystar Inc. b: Gas Ratio Dependant |
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