Tystar Nitride Furnace 1 - N Doping
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| Equipment | | | Equipment | Tystar Nitride Furnace 1 |
| Manufacturer: | Tystar Inc. |
| Model | Nitride |
| Tube Size | Up to 6 in wafer |
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| Recipe |
| Recipe Name: | NDOPECOMM |
| Doping Source | Phosphorus |
| Gas | N2 1000 sccm |
| Pressure | Atmosphere |
| Temperature | 800 – 1250 ◦C |
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| Resultsa |
| Sheet Resistivity | |
| Uniformity: |
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