Tystar Nitride Furnace 2 - P Doping
 |
| Equipment | | | Equipment | Tystar Nitride Furnace 2 |
| Manufacturer: | Tystar Inc. |
| Model | Nitride |
| Tube Size | Up to 6 in wafer |
|
|
|
| Recipe |
| Recipe Name: | PDOPECOMM |
| Doping Source | Boron Nitride |
| Gas | N2 1000 sccm |
| Pressure | Atmosphere |
| Temperature | 800 – 1250 ◦C |
|
|
|
| Resultsa |
| Sheet Resistivity | |
| Uniformity: |
|
|