Tystar Nitride Furnace 3 - Dry Oxidation
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| Equipment | | | Equipment | Tystar Nitride Furnace 3 |
| Manufacturer: | Tystar Inc. |
| Model | Nitride |
| Tube Size | Up to 6 in wafer |
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| Recipe |
| Recipe Name: | Dry Oxidation |
| Gas | O2 (Pyrogenic only) |
| Gas Flow Rate | ~ 3 slpm |
| Pressure | Atmosphere |
| Temperature | 800 – 1250 ◦C |
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| Resultsa |
| Index of Refraction | 1.45 – 1.47 |
| Uniformity: | 100 - 500 Angstroms < 5% (using 1σ std. Deviation) |
| Uniformity: |
>500 Angstroms < 3% |
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