Tystar Nitride Furnace 3 - Wet Oxidation
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| Equipment | | | Equipment | Tystar Nitride Furnace 3 |
| Manufacturer: | Tystar Inc. |
| Model | Nitride |
| Tube Size | Up to 6 in wafer |
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| Recipe |
| Recipe Name: | Wet Oxidation |
| Gas | H2/O2 (Pyrogenic only) |
| DI H2O Steam |
| Pressure | Atmosphere |
| Temperature | 800 – 1250 ◦C |
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| Resultsa |
| Index of Refraction | 1.45 – 1.4 |
| Uniformity: | <2000 Angstroms < 3% (using 1σ std. Deviation) |
| Uniformity: | >2000 Angstroms < 2% (using 1σ std. Deviation) |
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| a: All data is updated as the date indicated above |
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