Often thought of for showing the final MEMS device, taking images along the way can help identify potential issues. Optical microscopes are often used to see if photoresist could be over or under developed. Sems can let users see how large the surface grains are on top, or with the use of cross-sectioning the grains develop through out the structure. Grain sizes can often be related to the electrical, mechanical and thermal performance of a material. Some of the SEMs are equiped with EDX/EDS which allow for potential identification of the alloys at interfaces.