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Processing
Equipment Baseline
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Basic Cleanroom Guides
New Processing Page - Draft
Processing Guide - old
Processing Recipes
Annealing / Sintering
Dielectric PECVD Deposition (non-thermal)
Doping
Etching Tools Dielectric Recipes
Etching Tools Metal Recipes
Etching Tools Polymer Recipes
Etching Tools Semiconductor Recipes
Thermal Film Growth
Processing Fundamentals
Processing Information
Recipe Library
Annealing / Sintering
Tystar Furnace
Tystar Furnace
Equipment
Tystar Furnace
Temp (°C)
250 - 700
700 - 1350
Pressure (mT)
atm
Gas (sccm)
Forming Gas
3000 - 10000
N
2
3000 - 10000
O
2
3000 - 10000
Ar
3000 - 10000
Contact Information
Hang Chen, Ph.D.
Process Support Manager
The Institute for Electronics and Nanotechnology at Georgia Tech
345 Ferst Drive, Atlanta GA, 30332 | 1152
404.894.3360 | hang.chen@ien.gatech.edu
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