IEN - Micro/Nano Fabrication Facility
Lecture Sessions

 

Photolithography - Mr. Devin Brown

Chemical Vapor Deposition - Dr. Mikkel Thomas

Physical Vapor Deposition - Dr. Hang Chen

Wet Etching & Dry Etching - Dr. Mikkel Thomas

Oxidation & Diffusion - Dr. Seung-Joon Paik

Packaging Fundamental - Dr. Hang Chen

Characterization & Testing - Mr. Devin Brown

Contact Information
Hang Chen, Ph. D
Research Scientist II
IEN Process Support Manager

Institute for Electronics and Nanotechnology (IEN)
Georgia Institute of Technology
hang.chen@ien.gatech.edu
404-894-3360 (Office)