IEN - Micro/Nano Fabrication Facility

The Fabrication Bays are one of primary components of the Organic Cleanroom. Both fabrication bays house UV filter light fixtures in addition to lithography, direct writing, and printing tools. 

The direct writing and printing techniques are enabled by computer-controlled two- and three-dimensional pattern formation in a serial fashion. Comparing to other patterning approaches including lithography, and stamping methods, direct write or print based fabrication does not require masks or preexisting patterns, offers versatility to modify fabrication configurations rapidly for proof-of-concept studies and design optimization.  In addition, the precise  control  of  material  properties with  high  resolution deposition enable structures that are either impossible or impractical  to  make  with  traditional  techniques.

Direct Printing Technologies

Jetlab II Ink Jet Printer                                                          Bioforce Nano Enabler            

                    

 

Direct-write Technologies

                   Nanoscribe                                                                    MakerBot Replicator

      

 

Soft Lithography 

The Organic Cleanroom houses the Soft lithography Bay. This bay contains equipment specifically designed equipment for Soft Lithography fabrication. Soft lithography is a complementary extension of photolithography and is based on rapid prototyping using negative photoresist SU-8, and on replica molding of poly(dimethylsiloxane) (PDMS) onto the SU-8 film patterned by UV lithography. Due to its unique advantages such as low cost, compatible with large or non-planar surfaces, bio-compatible, etc., it has found its application in many area such as micro-and nanoscale patterning, nano functional devices (OLED, optical transducer, optical waveguide, etc.), and especially in biological researches.

          

         MJB4 Mask Aligner                              Technics RIE                                        Spin Coater

                 

Contact Information
Dr. Jie Xu
Senior Research Scientist
jie.xu@gtri.gatech.edu
404-407-6122

Blake Cotney
Graduate Research Assistant
bcotney3@gatech.edu
404-385-0151

Erin C. Prowett
Research Scientist
erin.prowett@ien.gatech.edu
404-894-3371