IEN - Micro/Nano Fabrication Facility
Advanced Training Workshop

Advanced Training Workshop

Advanced Training Workshop is a new program that IEN cleanroom designed for current and future cleanroom users. The workshop is focused on various metrology technqiues that are often used in micro/nano fabrication in cleanroom. The 2-day workshop will cover ellipsometry, profilometry, scanning electron microscope (SEM) and several other techniques. The purpose of this workshop is go enhance trainees' knowledge on metrology, and help them to solve their actual problem during fabrication process for both academia and industry.

The workshop is consisted of several lectures and hand-on lab sessions. Trainees will get trained and use the state-to-art metrology equipment in real research cleanroom to gain the hand-on experience.

Target Audience

Attendance is open to the general technical community and is not limited to current Georgia Tech students or IEN users. Anyone who expects to become an IEN cleanroom user is strongly encouraged to attend this course. The course is suitable for both new and experienced researchers interested in micro-fabrication techniques and applications. A course emphasis will be placed on IEN cleanroom resources, however, the concepts and techniques discussed are applicable to a broad array of research in this field.

Registration

The Advanced Training Workshop will be launched in Spring 2017. Notice will be posted on cleanroom website.

Contact Information
Hang Chen, Ph. D
Research Scientist II
IEN Process Support Manager

Institute for Electronics and Nanotechnology (IEN)
Georgia Institute of Technology
hang.chen@ien.gatech.edu
404-894-3360 (Office)