IEN - Micro/Nano Fabrication Facility
Pettit Cleanroom Inspection Form 
Contact Information
First Name
Last Name
Email
Phone
School/Department/Company
Pettit Cleanroom Inspection Form 
Chase 20
Is the floor dry and free of trip hazards?
Yes
No
N/A
Are all power cords in good condition? (no frayed connections, loose wires, or other hazards)
Yes
No
N/A
Are the electrical panels free of obstructions?
Yes
No
N/A
Is the scrubber working properly? (There are no alarms)
Yes
No
N/A
Is the space under the vacuum pumps free of any fluid puddles that might indicate a leak?
Yes
No
N/A
Are all of the gas or fluid lines secure--not dangling, loose connections, or other problems?
Yes
No
N/A
Do all of the lights work?
Yes
No
N/A
Are all gas cylinders properly secured?
Yes
No
N/A
Is it free of any other hazards or problems?
Yes
No
N/A
Comments:
Chase 52
Is the floor dry and free of trip hazards?
Yes
No
N/A
Are all power cords in good condition? (no frayed connections, loose wires, or other hazards)
Yes
No
N/A
Are the electrical panels free of obstructions?
Yes
No
N/A
Is the scrubber working properly? (There are no alarms)
Yes
No
N/A
Is the space under the vacuum pumps free of any fluid puddles that might indicate a leak?
Yes
No
N/A
Are all of the gas or fluid lines secure--not dangling, loose connections, or other problems?
Yes
No
N/A
Do all of the lights work?
Yes
No
N/A
Are all gas cylinders properly secured?
Yes
No
N/A
Is it free of any other hazards or problems?
Yes
No
N/A
Comments:
Chase 36
Is the floor dry and free of trip hazards?
Yes
No
N/A
Are all power cords in good condition? (no frayed connections, loose wires, or other hazards)
Yes
No
N/A
Are the electrical panels free of obstructions?
Yes
No
N/A
Is the scrubber working properly? (There are no alarms)
Yes
No
N/A
Is the space under the vacuum pumps free of any fluid puddles that might indicate a leak?
Yes
No
N/A
Are all of the gas or fluid lines secure--not dangling, loose connections, or other problems?
Yes
No
N/A
Do all of the lights work?
Yes
No
N/A
Are all gas cylinders properly secured?
Yes
No
N/A
Is it free of any other hazards or problems?
Yes
No
N/A
Comments:
Chase 19
Is the floor dry and free of trip hazards?
Yes
No
N/A
Are all power cords in good condition? (no frayed connections, loose wires, or other hazards)
Yes
No
N/A
Is the scrubber working properly? (There are no alarms)
Yes
No
N/A
Is the space under the vacuum pumps free of any fluid puddles that might indicate a leak?
Yes
No
N/A
Are all of the gas or fluid lines secure--not dangling, loose connections, or other problems?
Yes
No
N/A
Do all of the lights work?
Yes
No
N/A
Are all gas cylinders properly secured?
Yes
No
N/A
Is it free of any other hazards or problems?
Yes
No
N/A
Comments:
Chase 25
Is the floor dry and free of trip hazards?
Yes
No
N/A
Are all power cords in good condition? (no frayed connections, loose wires, or other hazards)
Yes
No
N/A
Are the electrical panels free of obstructions?
Yes
No
N/A
Is the scrubber working properly? (There are no alarms)
Yes
No
N/A
Is the space under the vacuum pumps free of any fluid puddles that might indicate a leak?
Yes
No
N/A
Are all of the gas or fluid lines secure--not dangling, loose connections, or other problems?
Yes
No
N/A
Do all of the lights work?
Yes
No
N/A
Are all gas cylinders properly secured?
Yes
No
N/A
Is it free of any other hazards or problems?
Yes
No
N/A
Comments:
Chase 29
Is the floor dry and free of trip hazards?
Yes
No
N/A
Are all power cords in good condition? (no frayed connections, loose wires, or other hazards)
Yes
No
N/A
Are the electrical panels free of obstructions?
Yes
No
N/A
Is the scrubber working properly? (There are no alarms)
Yes
No
N/A
Is the space under the vacuum pumps free of any fluid puddles that might indicate a leak?
Yes
No
N/A
Are all of the gas or fluid lines secure--not dangling, loose connections, or other problems?
Yes
No
N/A
Do all of the lights work?
Yes
No
N/A
Are all gas cylinders properly secured?
Yes
No
N/A
Is it free of any other hazards or problems?
Yes
No
N/A
Comments:
Chase 30
Is the floor dry and free of trip hazards?
Yes
No
N/A
Are all power cords in good condition? (no frayed connections, loose wires, or other hazards)
Yes
No
N/A
Are the electrical panels free of obstructions?
Yes
No
N/A
Is the scrubber working properly? (There are no alarms)
Yes
No
N/A
Is the space under the vacuum pumps free of any fluid puddles that might indicate a leak?
Yes
No
N/A
Are all of the gas or fluid lines secure--not dangling, loose connections, or other problems?
Yes
No
N/A
Do all of the lights work?
Yes
No
N/A
Are all gas cylinders properly secured?
Yes
No
N/A
Is it free of any other hazards or problems?
Yes
No
N/A
Comments:
Chase 26
Is the floor dry and free of trip hazards?
Yes
No
N/A
Are all power cords in good condition? (no frayed connections, loose wires, or other hazards)
Yes
No
N/A
Are the electrical panels free of obstructions?
Yes
No
N/A
Is the scrubber working properly? (There are no alarms)
Yes
No
N/A
Is the space under the vacuum pumps free of any fluid puddles that might indicate a leak?
Yes
No
N/A
Are all of the gas or fluid lines secure--not dangling, loose connections, or other problems?
Yes
No
N/A
Do all of the lights work?
Yes
No
N/A
Are all gas cylinders properly secured?
Yes
No
N/A
Is it free of any other hazards or problems?
Yes
No
N/A
Comments:
Chase 44
Is the floor dry and free of trip hazards?
Yes
No
N/A
Are all power cords in good condition? (no frayed connections, loose wires, or other hazards)
Yes
No
N/A
Are the electrical panels free of obstructions?
Yes
No
N/A
Is the scrubber working properly? (There are no alarms)
Yes
No
N/A
Is the space under the vacuum pumps free of any fluid puddles that might indicate a leak?
Yes
No
N/A
Are all of the gas or fluid lines secure--not dangling, loose connections, or other problems?
Yes
No
N/A
Do all of the lights work?
Yes
No
N/A
Are all gas cylinders properly secured?
Yes
No
N/A
Is it free of any other hazards or problems?
Yes
No
N/A
Comments:
Telecom Room
Is the area free from any clutter?
Yes
No
N/A
Does the HVAC work?
Yes
No
N/A
Are the lights working properly?
Yes
No
N/A
Is the area free from any other hazards or problems?
Yes
No
N/A
Comments:
Loading Dock
Is the emergency shower free of obstructions?
Yes
No
N/A
Are the doors working properly and free of obstructions?
Yes
No
N/A
Is the area clear of any hazards? Hazards are defined by spills, improperly stored materials, trip hazards, or other unsafe conditions. When in doubt answer no.
Yes
No
N/A
Is it free of any other hazards or problems?
Yes
No
N/A
Comments:
Base/Solvent Storage
Are materials properly stored? Only bases and solvents should be stored in this area?
Yes
No
N/A
Is the room free of any spills or unusual odors?
Yes
No
N/A
Is the fan running?
Yes
No
N/A
Is it free of any other hazards or problems?
Yes
No
N/A
Comments:
Acid Storage
Are the materials properly stored? Only acids should be in this room.
Yes
No
N/A
Is the room free of any spills or unusual odors?
Yes
No
N/A
Is the fan running?
Yes
No
N/A
Is it free from any other hazards or problems?
Yes
No
N/A
Comments:
Flammable/Corrosive/Toxic Gas Storage
Are all gas cylinders properly chained/strapped to the racks?
Yes
No
N/A
Do all of the gas cylinders have caps?
Yes
No
N/A
Is the room free of non-compatible gases? Non-compatible gases are oxidizers or pyrophorics.
Yes
No
N/A
Are corrosive or toxic gases stored in the gas cabinets?
Yes
No
N/A
Is it free of any other hazards or problems?
Yes
No
N/A
Comments:
Oxidizer/Inert Gas Storage (under cooling tower)
Are all gas cylinders properly chained/strapped to the racks?
Yes
No
N/A
Do all of the gas cylinders have caps?
Yes
No
N/A
Is the area free of non-compatible gases? Non-compatible gases are flammables, pyrophorics, or corrosives.
Yes
No
N/A
Is it free from any other hazards or problems?
Yes
No
N/A
Comments:
6,000 Gallon LN2 Tank
Is the tank free of excessive icing around the valves, concrete pad, or surrounding, area? When in doubt, answer no.
Yes
No
N/A
Does the vaporizer in use have more than 50% ice build-up?
Yes
No
N/A
Is there any unusual hissing that might indicate a leak?
Yes
No
N/A
Is it free of any other hazards or problems?
Yes
No
N/A
Comments:
Silane Storage
Is the Silane cylinder, if present, properly secured inside the gas cabinet?
Yes
No
N/A
Is it free of any other hazards or problems?
Yes
No
N/A
Comments:
3,000 Gallon LN2 Tank
Is the tank free of excessive icing around the valves, concrete pad, or surrounding area? When in doubt, answer no.
Yes
No
N/A
Is there any unusual hissing that might indicate a leak?
Yes
No
N/A
Is the rolling gate free of any obstructions?
Yes
No
N/A
Is the stainless steel supply line going into the building free of any ice buildup?
Yes
No
N/A
Is it free of any other hazards or problems?
Yes
No
N/A
Comments:
Georgia Institute of Technology
Shared User Management System
791 Atlantic Drive
Atlanta GA 30332-0269 
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