IEN - Micro/Nano Fabrication Facility
Research Equipment Give Away

List of Available IEN Equipment

 

TMC 74" x 78" isolation pad

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TMC 84" x 56" isolation pad

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TMC 84" x 55" isolation pad

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TMC active isolation legs

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Granville Phillips Model 307 ion gauge controller

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MKS Type 252A exhaust valve controller

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MKS Type 286 controller

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MKS Type 290 ion gauge controller

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Varian 843 ion gauge controller

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Assorted box of stuff

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CVC GIC-410 Ion Gauge

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DYN-Optics Optical Monitor 590

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Gas Manifold with MSC

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Granville-Phillips 303 Vacuum Process Controller

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Harrison Laboratories DC Power Supply

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Inficon IC 6000

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MKS Ion Gauge Controller Type 290 (1)

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MKS Ion Gauge Controller Type 290 (2)

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MKS Ion Gauge Controller Type 290 (3)

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MKS PDR-C-1C Power Supply Readout

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MKS Type 252 Exhaust Valve Controller

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MKS Type 252 Exhaust Valve Controller (2)

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MKS Type 270 Signal Controller

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RF Plasma Product AM-5

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RFPP RF5S Water cooled RF Power Products

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Technics Micro-RIE Series 80

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Tektronix TM5006

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Tektronix 571 Curve Tracer

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Tektronix CFC250 Frequency Counter

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TSI Model 3700 Multiplexer Processor

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Various Vacuum Parts

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Contact Information
Gary Spinner
Email Address: gary.spinner@ien.gatech.edu
Phone Number: (404) 391-9182