IEN - Micro/Nano Fabrication Facility
Processing (Older)
Plasma Therm SLR RIE

Related Links
Contact Information
Hang Chen, Ph.D.
Process Support Manager
The Institute for Electronics and Nanotechnology at Georgia Tech
345 Ferst Drive, Atlanta GA, 30332 | 1152
404.894.3360 | hang.chen@ien.gatech.edu