IEN - Micro/Nano Fabrication Facility
Processing (Older)
Silicon Dioxide Etching

SiO2 Etch Rates

Contact Information
Hang Chen, Ph.D.
Process Support Manager
The Institute for Electronics and Nanotechnology at Georgia Tech
345 Ferst Drive, Atlanta GA, 30332 | 1152
404.894.3360 | hang.chen@ien.gatech.edu