IEN - Micro/Nano Fabrication Facility
Processing (Older)
Cr Etching

Etch Rates of Chromium (nm/min)

Chromium Etch Rates

Contact Information
Hang Chen, Ph.D.
Process Support Manager
The Institute for Electronics and Nanotechnology at Georgia Tech
345 Ferst Drive, Atlanta GA, 30332 | 1152
404.894.3360 | hang.chen@ien.gatech.edu