The LEO 1530 FE-SEM is a high-resolution SEM capable of 2 nanometer resolution; with attached ultra thin window energy dispersive spectrometer (EDS) for elemental analysis from B to U Detectors: In-Lens, SE, and BSE -capable of up to 6" wafer -operational voltage 0.2-30kV -low voltage for viewing non-conductive samples -x/y/z axes motorized stage