Shared User Management System
LEO 1530 SEM:
IEN/IMAT Materials Characterization Facility
Status:
Available
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Equipment Description

The LEO 1530 FE-SEM is a high-resolution SEM capable of 2 nanometer resolution; with attached ultra thin window energy dispersive spectrometer (EDS) for elemental analysis from B to U Detectors: In-Lens, SE, and BSE -capable of up to 6" wafer -operational voltage 0.2-30kV -low voltage for viewing non-conductive samples -x/y/z axes motorized stage

Institute Georgia Tech
Department IEN/IMAT Materials Characterization Facility
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LEO 1530 SEM
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How to schedule time on desktop
When you first view the calendar on your dashboard, it will show you your scheduled time along with any scheduled down events for tools you are a member of.  If you view the calendar on a tool page it will show you the above plus any scheduled events for that tool.  On your dashboard to select a tool click on the dropdown box at the top of the calendar section.

  Once you have selected a tool, or are on a tool page, to make a new reservation click and drag on the calendar from when you want your scheduled time to star to when you want your scheduled time to end.  This will open the schedule detail screen so that you can modify the schedule details and then save.
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