Hitachi S-4700 FE-SEM:
IEN - Micro/Nano Fabrication Facility
Status:
Available
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Equipment Description

The Hitachi S-4700 FE-SEM is a cold field emission high resolution scanning electron microscope. This SEM permits ultra high resolution imaging of thin films and semi-conductor materials on exceptionally clean specimens.

Department IEN - Micro/Nano Fabrication Facility
Sub Tool Of
Marcus Inorganic Cleanroom