CVC E-Beam Evaporator 2 -- Instructional Center:
IEN - Micro/Nano Fabrication Facility
Status:
Available
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Equipment Description

The e-beam evaporator is used to coat samples with various metals. Unlike sputtered films, evaporators only coat the surface facing away from the substrate. -Typical deposition rates range from <1 angstroms/sec to 3 angstroms/sec.

Institute Georgia Tech
Department IEN - Micro/Nano Fabrication Facility