SCS G3P8 Spin Coater -- Instructional Center:
IEN - Micro/Nano Fabrication Facility
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Equipment Description

The SCS G3P8 Spin Coater series accurately applies liquid coating materials on planar substrates. This spin coater stores and executes up to 30 programs with up to 20 steps each. Each step of the cycle can be defined in the range of 0-9999RPM with ramp times from 0.1 to 25.5 seconds. Ramp-up time is dependent on the chuck size and the substrate weight. A single step may have a dwell time of up to 999 seconds. Coating cycles are interruptible by the operator at any time. This spin coater has chucks designed for wafers or pieces 1-4 inches

Institute Georgia Tech
Department IEN - Micro/Nano Fabrication Facility