Dektak 150 Profilometer -- Instructional Center:
IEN - Micro/Nano Fabrication Facility
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Equipment Description
The Veeco Dektak 150 is a surface profilometer (by stylus contact) capable of down to 4 angstrom step height measurement. This profilometer is comparable to the Tencor P15 Profilometers in performance and operation.

-1 mm max step height
-automated X and Y stage
-up to 6" (150mm) wafer
-stylus force down to 1mg
Institute Georgia Tech
Department IEN - Micro/Nano Fabrication Facility
Reservation mode Schedule
Days Past To Load:
My Time
Others' Time
How to schedule time on desktop
When you first view the calendar on your dashboard, it will show you your scheduled time along with any scheduled down events for tools you are a member of.  If you view the calendar on a tool page it will show you the above plus any scheduled events for that tool.  On your dashboard to select a tool click on the dropdown box at the top of the calendar section.

  Once you have selected a tool, or are on a tool page, to make a new reservation click and drag on the calendar from when you want your scheduled time to star to when you want your scheduled time to end.  This will open the schedule detail screen so that you can modify the schedule details and then save.
Schedule Rules
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Billing Group Specific Scheduling Rules
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