Dektak 150 Profilometer -- Instructional Center:
IEN - Micro/Nano Fabrication Facility
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Equipment Description
The Veeco Dektak 150 is a surface profilometer (by stylus contact) capable of down to 4 angstrom step height measurement. This profilometer is comparable to the Tencor P15 Profilometers in performance and operation.

Specifications:
-1 mm max step height
-automated X and Y stage
-up to 6" (150mm) wafer
-stylus force down to 1mg
Institute Georgia Tech
Department IEN - Micro/Nano Fabrication Facility