Dektak 150 Profilometer -- Instructional Center:
IEN - Micro/Nano Fabrication Facility
Status:
Available
Information
Contact Us
Equipment Description
The Veeco Dektak 150 is a surface profilometer (by stylus contact) capable of down to 4 angstrom step height measurement. This profilometer is comparable to the Tencor P15 Profilometers in performance and operation.

Specifications:
-1 mm max step height
-automated X and Y stage
-up to 6" (150mm) wafer
-stylus force down to 1mg
Institute Georgia Tech
Department IEN - Micro/Nano Fabrication Facility
Reservation mode Schedule
Days Past To Load:
My Time
Others' Time
How to schedule time on desktop
When you first view the calendar on your dashboard, it will show you your scheduled time along with any scheduled down events for tools you are a member of.  If you view the calendar on a tool page it will show you the above plus any scheduled events for that tool.  On your dashboard to select a tool click on the dropdown box at the top of the calendar section.

  Once you have selected a tool, or are on a tool page, to make a new reservation click and drag on the calendar from when you want your scheduled time to star to when you want your scheduled time to end.  This will open the schedule detail screen so that you can modify the schedule details and then save.
Schedule Rules
You are not associated with a rule set.
Billing Group Specific Scheduling Rules
BG Scheduling Rule NameToolBilling Group
Max Hours Per Day
No scheduling rules bgs to show...
0 records
No article associated with this equipment.
Send A Request
New Service Request